Management of Out-of-Control Action Plans

When the manufacturing process goes wrong, it can have serious implications. In such situtations, where the process can be said to have gone "out of control", an action plan is typically initiated to mitigate the immediate condition and, typically, to also prevent further occurrences. Every different fault scenario can require a different action plan, and the more complex the manufacturing process, the more action plans need to be created and managed. We worked with a semiconductor manufacturing customer to create a solution that would initially manage the Out of Control Action Plans for their chemical deposition process, but would also have the flexibility to allow it to be expanded to ultimately cater for other lot and tool OCAPs throughout the entire facility.

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Key features:

• The system simplifies the process of tracking OCAPs by forcing the lot to follow a predefined state transition.
• Update the process flow in the MES system.
• Collect Operation data.
• Assist with tool availability. (sign tools up or down)
• Generate reports.

Complex work flows are configured to ensure each OCAP type is followed correctly, history kept and accountability ensured.